| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibrator and a piezoelectric device in a short period of time by which a vibration balance is improved and a CI value is reduced. <P>SOLUTION: In this method for manufacturing the piezoelectric vibrator, which is provided with: a base part 51; a pair of oscillating arms 34 and 35 formed integrally with the base part and extended in parallel from the base part; and long grooves 56 and 57 formed in the longitudinal directions of those respective vibrating arms, the outer shape and long grooves of the piezoelectric vibrator are formed by an etching method. A piezoelectric substrate 72 is prepared, and the outer shape of the piezoelectric oscillating piece is formed by wet etching, and the long grooves are formed by dry etching. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
