| 摘要 |
A reflective-type projection optical system equipped with 8 reflective mirrors that forms a reduced image of a first surface on a second surface. It is equipped with a first reflective imaging optical system (G 1 ) for forming an intermediate image of the first surface and a second reflective imaging optical system (G 2 ) for forming an image of the intermediate image on the second surface. The first reflective imaging optical system has, from the first surface side in order of light beam incidence, a first reflective mirror (M 1 ), a second reflective mirror (M 2 ), a third reflective mirror (M 3 ), and a fourth reflective mirror (M 4 ). The second reflective imaging optical system has, from the first surface side in order of light beam incidence, a fifth reflective mirror (M 5 ), a sixth reflective mirror (M 6 ), a seventh reflective mirror (M 7 ), and an eighth reflective mirror (M 8 ). At least one of the reflective surfaces of these 8 reflective mirrors is composed of a spherical surface.
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