| 摘要 |
Disclosed is an interferometric measuring method for detecting shapes, which is based on the interferometric observation of a surface of an object with narrow-band light. A relative movement between the interferometer (1) and the surface (2) of the object generates a test signal on an appropriate photoreceiver, e.g. a camera circuit (5), two closely adjacent signal frequencies (f<SUB>0</SUB> and f<SUB>0</SUB>+?f) being extracted from said test signal. The phase difference of the two signal portions is used for determining the distance or the change in distance. The inventive method provides a large univalent area, thus allowing for a great depth measurement range. Said method can be used also with workpieces whose surfaces are provided with steps, measurement not being disrupted at edges and steps of the workpiece. The disclosed method makes it possible to analyze even heavily slanted surfaces which are inclined to such a degree that the same cannot be measured by means of conventional methods that are based on generating and evaluating interference lines because the density of said interference lines is too great. |
