| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vertical heat treatment device for increasing the number of stored carrying vessels without increasing footprints and for improving throughput, and to provide an application method of the vertical heat treatment device. <P>SOLUTION: The vertical heat treatment device 1 comprises carry-in/carry-out sections 3, 4 for carrying in and out the carrying vessel 2 for storing a plurality of bodies (w) to be treated; a first storage section 5 for storing the plurality of carrying vessels 2 carried in from the carry-in/carry-out sections 3, 4; a heat-treatment oven 7 for storing a holder 6 for holding a number of bodies (w) to be treated in multiple stages and for performing prescribed heat treatment to the bodies (w) to be treated; and a transfer section 8 for transferring the carrying vessel 2 for transferring the bodies (w) to be treated between the holder 6 and the carrying vessel 2. In the vertical heat treatment device 1, the carry-in/out sections 3, 4 are provided in upper and lower stages, and a second storage section 20 for storing the carrying vessel 2 is provided between the upper-stage and lower-stage carry-in/out sections 3, 4. One of the carry-in/out sections 3, 4 stores the carrying vessel 2 in a third storage section 30. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
