BEAM OR RAY DEFLECTOR AND SCANNING MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a beam or ray deflector and a scanning microscope in which noise is reduced at least in a sound volume level. SOLUTION: In a beam or ray deflector equipped with at least one deflecting means that is movably arranged for the purpose of adjustably deflecting a beam or a ray, the movably arranged deflecting means (15) is positioned in a fully soundproof casing (17) equipped with a light incident window (19) and/or a light emitting window (23). COPYRIGHT: (C)2006,JPO&NCIPI