| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer apparatus and an adapter for setting cassette for setting many cassettes in different shapes without replacement of cassette guide and adjustment in position in accordance with the cassettes. SOLUTION: In the wafer transfer apparatus W provided with an elevator 3 for lifting and lowering the cassettes accommodating wafers to transfer the wafers by extracting the wafers therefrom, cassette setting adapters 4 of a plurality of kinds for positioning and mounting to the elevator 3 are provided removably. Each cassette setting adapter 4 is constituted to provide a cassette guide 21 for mounting the cassettes of a plurality of kinds of different shapes to the predetermined position for each cassette. COPYRIGHT: (C)2006,JPO&NCIPI
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