| 摘要 |
PROBLEM TO BE SOLVED: To provide a mass separation type doping apparatus capable of uniformly pouring the target nuclide into an object to be irradiated. SOLUTION: The mass separation type doping apparatus comprises a casing 1 including a passage of ion and having a circular cross section, a coil 5 wound around the casing to surround the circular cross section, and a power supply for allowing a current to flow through the coil 5. The region where the coil 5 is wound includes a first density winding region where the coil is wound with a first density and a second winding region where the coil is wound with a second density lower than the first density in a region avoiding a position where a beam current is maximum when the whole of the coil is wound with a uniform density. COPYRIGHT: (C)2006,JPO&NCIPI
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