| 摘要 |
PROBLEM TO BE SOLVED: To obtain an element distribution image reduced in the effect due to a change in the surface shape or state of a sample in an electronic probe X-ray analyzer for performing X-ray analysis by irradiating the sample with an electron beam. SOLUTION: The sample or the electron beam is scanned to two-dimensionally collect characteristic X-ray intensity data of a plurality of elements and, with respect to all of the coordinated positions of two-dimensional data, the characteristic X-ray intensity data of the respective elements are-converted to relative densities. Quantitative correction calculation is applied to these relative densities to obtain the mass concentrations of the respective elements. The sum total value of the relative intensities or mass concentrations of all of the elements at every coordinates position is used to standardize the relative intensities or mass concentrations of the respective elements and the values thereof are classified by a level to be displayed as the element distribution image. If necessary, the mass concentrations are used to calculate the concentrations of atoms, the concentrations of compounds, the number of atoms on the like at every coordinates position and these values are standardized to be displayed. Accordingly, the element distribution image reduced in the effect due to a change in the surface shape or state of the sample can be obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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