| 摘要 |
<p>The positioning device (1) has a lower carriage (4) and an upper carriage (6). The lower carriage is arranged on a stationary base (2) and is movable along a first axis (5). The upper carriage is arranged on the lower carriage and is movable along a second axis (7) orthogonal to the first. The lower carriage has a first deflection element (20) which deflects a laser beam, which is directed to the first deflection parallel to the first axis, to be parallel to the second axis. A second deflection element (21) is arranged on the upper carriage. This deflects a laser beam (13) which is parallel to the second axis, to be parallel to the first axis and couples it into a device (10) arranged on the upper carriage.</p> |
