发明名称 |
FAULT DETECTION SYSTEM AND METHOD BASED ON WEIGHTED PRINCIPAL COMPONENT ANALYSIS |
摘要 |
<p>A method and a system for performing a dynamic weighting technique for performing fault detection. The method comprises processing a workpiece (105) and performing a fault detection analysis relating to the processing of the workpiece (105). The method further comprises determining a relationship of a parameter relating to the fault detection analysis to a detected fault and adjusting a weighting associated with the parameter based upon the relationship of the parameter to the detected fault.</p> |
申请公布号 |
WO2006049839(A1) |
申请公布日期 |
2006.05.11 |
申请号 |
WO2005US36896 |
申请日期 |
2005.10.12 |
申请人 |
ADVANCED MICRO DEVICES, INC.;PURDY, MATTHEW, A. |
发明人 |
PURDY, MATTHEW, A. |
分类号 |
(IPC1-7):G05B19/418;G05B23/02 |
主分类号 |
(IPC1-7):G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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