| 摘要 |
A probe for a scanning probe microscope and a method of producing the probe, where the probe is capable of performing accurate measurement without the base of a cantilever coming in contact with an object to be measured and without the object being hidden by the base of the probe. A probe for a scanning probe microscope has a base (21, 31), a cantilever (23, 33) for support, horizontally extending from the base (21, 31), and a cantilever (24, 34) for measurement, provided at the head of the supporting cantilever (23, 33) and having a length of 20 micrometers or less and a thickness of 1 micrometer or less. |
