| 摘要 |
PROBLEM TO BE SOLVED: To provide a system that can compute a high precision mark attitude and mark position with a low image measurement throughput even from an image by a low resolution camera. SOLUTION: About a mark having two or more sets of parallel sides of different directions and having a known shape on a screen, the attitude of the mark, which minimizes the sum of squares of errors between measured points on all the parallel sides on the mark acquired by image processing of an image of the mark picked up by a television camera and the known positional relations between all the parallel sides, is computed with precision not higher than pixel resolution, and then the position of the mark is computed with precision not higher than pixel resolution. COPYRIGHT: (C)2006,JPO&NCIPI
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