| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device enhanced in throughput. SOLUTION: The irradiation light emitted from a light source 5 is converted to parallel light by a condensing lens part 6 and this parallel light is reflected by a half mirror 13 to subject the region to be inspected of an inspection target 1 to vertical illumination by an object lens 2. The image of the region to be inspected is transmitted through the half mirror 13 through the object lens 2 to be imaged by a camera 8. As the camera 8, one using CCD capable of photographing a color image as an imaging element can be used. In this embodiment, a light emitting diode reduced not only in a change in the spectrum of emitted light but also in a temporal change in the spectrum of emitted light even if brightness is adjusted is used as the light source 5. COPYRIGHT: (C)2006,JPO&NCIPI
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