| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing device capable of measuring accurately a supply current of an electronic device by removing fluctuations of a sub-threshold leak current of a field effect transistor included in the electronic device. SOLUTION: This testing device for testing the electronic device including the field effect transistor comprises a power source for supplying the power for driving the electronic device; a pattern generation part for generating and supplying successively a plurality of test patterns to be supplied to the electronic device; a leak current detection part for detecting a leak current in the field effect transistor; a voltage control part for controlling a substrate voltage applied to a substrate where the field effect transistor is provided so that the leak current detected by the leak current detection part has a prescribed value; and a supply current measuring part for measuring the supply current input into the electronic device at every time when each test pattern is applied and determining the quality of the electronic device, based on the measured supply current. COPYRIGHT: (C)2006,JPO&NCIPI
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