Method and device for plasma treating workpieces

摘要

Disclosed are a method and a device for plasma treating workpieces ( 5 ). Said workpiece is inserted into a chamber ( 4 ) of a treatment station ( 17 ), which can be at least partly evacuated, and at least one part ( 18 ) of the treatment station is moved relative to another part ( 27, 35 ) thereof in order to help manipulate the workpieces. The movement is carried out in such a way that a shell-shaped chamber wall ( 18 ) is positioned relative to a floor ( 35 ) of the chamber and relative to a chamber lid ( 27 ).