发明名称 Piezoelectric resonator element, piezoelectric device and gyro sensor
摘要 A piezoelectric resonator element, comprises: a base made of a piezoelectric material; at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base; a portion defining a long groove provided to each of the resonating arms along a longitudinal direction; and a driving electrode provided to the long groove. Each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction.
申请公布号 US2006087205(A1) 申请公布日期 2006.04.27
申请号 US20050252704 申请日期 2005.10.18
申请人 SEIKO EPSON CORPORATION 发明人 KIKUSHIMA MASAYUKI
分类号 H03H9/21 主分类号 H03H9/21
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