| 摘要 |
PROBLEM TO BE SOLVED: To provide a test equipment which can inspect for not only defects but shapes of an information recording medium, such as a CD or a DVD, and can also cope with high capacity. SOLUTION: An electron gun 12 irradiates a desired position of the information recording medium with an electron beam. A stage 18 movably holds the information recording medium in the rotation direction and the radial direction. A detector 22 detects electrons which acquire information on a surface of the information recording medium by irradiating the information recording medium with the electron beam. An image generating device 24 acquires images of the surface of the information recording medium from the electrons detected by the detector 22. COPYRIGHT: (C)2006,JPO&NCIPI
|
