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发明名称
Device For Controling The Pressure In The Process Chamber
摘要
申请公布号
KR100574485(B1)
申请公布日期
2006.04.27
申请号
KR19990066619
申请日期
1999.12.30
申请人
发明人
分类号
F16K13/00
主分类号
F16K13/00
代理机构
代理人
主权项
地址
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