TRANSMISSION TYPE ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To obtain a high-resolution image in a transmission type electron microscope having a CCD camera. SOLUTION: The transmission type electron microscope comprises an irradiation optical system for irradiating a sample with electron beams; an imaging apparatus having a CCD for capturing the transmission image of the sample; a transmission image moving device for moving a transmission image; and an image composition part for generating one image by compositing a plurality of images. The image composition part generates the same image as an image obtained by assuming that a light reception section is arranged at the non-light-reception section of the CCD by compositing the image obtained from the transmission image and an image obtained by moving the transmission image. COPYRIGHT: (C)2006,JPO&NCIPI