| 摘要 |
PROBLEM TO BE SOLVED: To inspect whether or not a foreign matter exists on a surface of a substrate and to provide an optimum treatment when the detection of the existence of the foreign matter is a plurality of times. SOLUTION: The substrate coating system has a mouthpiece 2 provided on a base 1; a substrate support base 3 capable of being reciprocated in a predetermined direction; a base plate 4 supported on the substrate support base 3 in the adsorption state; a light projection unit 5 for radiating a semiconductor laser beam in parallel to the mouthpiece 2 in the state having predetermined spreading; and a light receiving unit 6 for receiving the semiconductor laser beam. Further, the system has a control part for interrupting a substrate coating step in response to the existence of the foreign matter continued in a predetermined number or more. COPYRIGHT: (C)2006,JPO&NCIPI
|
