| 摘要 |
The invention relates to a device for the production of a plasma ( 16 ) within a housing comprising means for the generation of energy in the microwave spectrum, for the excitation of the plasma, said means comprise at least one basic plasma excitation device with a coaxial applicator ( 4 ) of microwave energy, one of the ends of which is connected to a production source ( 7 ) of microwave energy, the other end ( 8 ) of which is directed to the gas to be excited within the housing. The device is characterised in that each basic plasma excitation device is arranged in the wall ( 3 ) of the housing, each applicator ( 4 ) having a central core ( 5 ) which is essentially flush with the wall of the housing. The central core and the thickness of the wall ( 3 ) of the housing are separated by a space ( 6 ) coaxial to the central core, said space being totally filled, at least at the end of each applicator, by a dielectric material ( 14 ), such that said material is essentially flush with the level of the wall of the housing.
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