发明名称 |
Manufacturing method to construct semiconductor-on-insulator with conductor layer sandwiched between buried dielectric layer and semiconductor layers |
摘要 |
A method for treating exposed metal in a semiconductor wafer ( 301 ) in wafer processing is disclosed herein. In accordance with the method, a wafer is provided which is equipped with a metal layer ( 307 ) and a substrate ( 303 ), wherein a portion of the metal layer is exposed at the edge of the wafer. The exposed portion of the metal layer is then covered with a dielectric material ( 317 ).
|
申请公布号 |
US2006088994(A1) |
申请公布日期 |
2006.04.27 |
申请号 |
US20040971657 |
申请日期 |
2004.10.22 |
申请人 |
FREESCALE SEMICONDUCTOR INC. |
发明人 |
DAO THUY |
分类号 |
H01L21/4763;H01L21/302;H01L21/3205;H01L21/84 |
主分类号 |
H01L21/4763 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|