发明名称 Manufacturing method to construct semiconductor-on-insulator with conductor layer sandwiched between buried dielectric layer and semiconductor layers
摘要 A method for treating exposed metal in a semiconductor wafer ( 301 ) in wafer processing is disclosed herein. In accordance with the method, a wafer is provided which is equipped with a metal layer ( 307 ) and a substrate ( 303 ), wherein a portion of the metal layer is exposed at the edge of the wafer. The exposed portion of the metal layer is then covered with a dielectric material ( 317 ).
申请公布号 US2006088994(A1) 申请公布日期 2006.04.27
申请号 US20040971657 申请日期 2004.10.22
申请人 FREESCALE SEMICONDUCTOR INC. 发明人 DAO THUY
分类号 H01L21/4763;H01L21/302;H01L21/3205;H01L21/84 主分类号 H01L21/4763
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