| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a film forming method of large-size pellicle capable of obtaining a uniform solution film by using a slit coating method and capable of reliably forming a pellicle film. <P>SOLUTION: In the film forming method of large-size pellicle, a film is formed by a slit coater on a glass substrate having at least one side≥500 mm, subjected to mirror surface finishing, wherein coating is performed by setting the slit width of a die to≥20μm and≤140μm. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
