| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and highly sensitive optical angle sensor. SOLUTION: Diffused light emergent from a spot light source 100 is passed through a polarization beam splitter 120 and a quarter wave plate 130 and modified into parallel light to irradiate a sample surface by a lens 170 combining a collimating lens and an objective lens. Reflected light is converged by the lens 170 and passed through the quarter wave plate 130. Light reflected at the polarization beam splitter 120 is detected by a light spot position detection element 160 arranged at a focal position in the optical angle sensor. Since it is possible to constitute the optical angle sensor of a few number of parts and acquire high sensitivity, the compact and highly sensitive optical angle sensor can be constituted. COPYRIGHT: (C)2006,JPO&NCIPI
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