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发明名称
ÄTZLÖSUNG FÜR DAS SELEKTIVE ÄTZEN VON SILIZIUMOXID MIT FLUORID-SALZ, KOMPLEXMITTEL UND GLYKOL-LÖSUNGSMITTEL
摘要
申请公布号
DE69833692(D1)
申请公布日期
2006.04.27
申请号
DE19986033692
申请日期
1998.12.16
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
WOJTCZAK, WILLIAM;NGUYEN, LONG;FINE, A.
分类号
C09K13/06;H01L21/00;C09K13/00;C09K13/08;H01L21/308;H01L21/311
主分类号
C09K13/06
代理机构
代理人
主权项
地址
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