| 摘要 |
<P>PROBLEM TO BE SOLVED: To adequately support analysis and evaluation of alignment result by an operator. <P>SOLUTION: At the upper part of the real waveform data in the window, the differentiated data of the real waveform data are displayed in the condition corresponding to the real waveform data. Measuring range of the waveform data as the processing object of waveform processing simulation, differentiated data of the waveform data, edge candidate position, each line mark position, relationship between each line mark position and edge candidate position, mark detecting position, error information, and template pattern or the like are displayed corresponding to the waveform data. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
