| 摘要 |
PROBLEM TO BE SOLVED: To provide an excellent method of stamping molding to form a fine pattern irrespective of the glass transition point of a polyimide resin. SOLUTION: The method of fine patterning a polyimide resin comprises the steps of coating a substrate surface with a polyamic acid solution, partially drying the solution, thermocompression-bonding a molding material heated at 100°C or higher on the substrate in a depressurized vessel, and peeling off the molding material to form a fine pattern. Preferably, the viscosity of the polyamic acid solution is not smaller than 50 Pa s and not larger than 3,000 Pa s at 23°C and the solid concentration is 5-40 wt%. COPYRIGHT: (C)2006,JPO&NCIPI |
