<p>Systems and methods for controlling the temperature of a wafer are disclosed. These systems and methods may employ a back side wafer pressure control system (BSWPC) that includes subsystems and a controller operable in tandem to control the temperature of wafers in one or more process chambers. The subsystems may include mechanical components for controlling a flow of gas to the backside of a wafer while the controller may be utilized to control these mechanical components in order to control wafer temperature in a process chamber. Furthermore, embodiments of these systems and methods may also use a chiller in combination with the controller to provide both coarse and fine temperature control.</p>
申请公布号
WO2006044724(A1)
申请公布日期
2006.04.27
申请号
WO2005US37130
申请日期
2005.10.13
申请人
ENTEGRIS, INC.;TINSLEY, KENNETH, E.;TISON, STUART, A.