APPARATUS AND METHOD FOR DEPOSITING FINE PARTICLES

摘要

A method for depositing fine particles which comprises spraying a dispersion having a solvent and fine particles dispersed in the solvent from the pointed end of a capillary as a fine fluid droplet flow, while electrically charging the sprayed fine fluid droplets, introducing the fluid droplet flow to a chamber under reduced pressure through a jet nozzle, to form a free jet stream, introducing the free jet stream running in the chamber under reduced pressure into the interior of a film forming chamber through a skimmer nozzle provided thereto, to form a charged fine particle flow, and then sorting fine particles having a specific energy onlyfrom fine particles in the charged fine particle flow by the use of an energy separation device and depositing them on an article to receive them arranged in the interior of the chamber. The above method allows the preparation of a fine particle deposit which is free from the contamination of an impurity (is homogeneous) and is formed only by particles having a desired size.