| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning microscope in which (configuring elements of) the microscope are efficiently cooled by a simply structured means. SOLUTION: Such a scanning microscope as a confocal scanning microscope is composed by including a scanning unit (1), a detecting unit (2), an electronic unit (3) for operating the scanning microscope, and a cooling unit for at least one configuring element of the scanning microscope. The cooling unit (4) is characterized in that the unit is composed so as to be operated with a liquid cooling medium. COPYRIGHT: (C)2006,JPO&NCIPI |
