发明名称 MANUFACTURING METHOD OF LIGHT-EMITTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a light-emitting device restraining degradation of light-emitting elements. SOLUTION: In the manufacturing method of the light-emitting device equipped with a plurality of light-emitting elements each having an organic compound layer between an anode and a cathode, an organic compound layer is formed on the anode, and after that, plasma is made generated in an atmosphere containing hydrogen to terminate defects in the organic compound layer with the hydrogen and form a cathode on the organic compound layer. In doing so, unstable bonding existing or generated due to some causes (such as heat generation at light emission, light irradiation, and temperature change) in the organic compound layer can be reduced. Therefore, improvement in reliability and brightness as light-emitting elements can be achieved. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006114519(A) 申请公布日期 2006.04.27
申请号 JP20060014649 申请日期 2006.01.24
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;HIROKI MASAAKI;MURAKAMI MASAKAZU;KUWABARA HIDEAKI
分类号 H05B33/10;H01L51/50 主分类号 H05B33/10
代理机构 代理人
主权项
地址