摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a light-emitting device restraining degradation of light-emitting elements. SOLUTION: In the manufacturing method of the light-emitting device equipped with a plurality of light-emitting elements each having an organic compound layer between an anode and a cathode, an organic compound layer is formed on the anode, and after that, plasma is made generated in an atmosphere containing hydrogen to terminate defects in the organic compound layer with the hydrogen and form a cathode on the organic compound layer. In doing so, unstable bonding existing or generated due to some causes (such as heat generation at light emission, light irradiation, and temperature change) in the organic compound layer can be reduced. Therefore, improvement in reliability and brightness as light-emitting elements can be achieved. COPYRIGHT: (C)2006,JPO&NCIPI
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