| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromirror device applicable to an optical switch, in which a distortion of an optical beam hardly occurs, and an optical signal is switched at high speed. SOLUTION: The micromirror device having a micromirror and a piezoelectric actuator array on which a plurality of piezoelectric elements are arranged is provided. The micromirror device is characterized in that the device has an elastic member between the micromirror and the piezoelectric actuator array, and the elongation and the contraction of the piezoelectric elements composing the piezoelectric actuator array are transformed into a rotational dislocation into two axis directions of the micromirror via the elastic member. COPYRIGHT: (C)2006,JPO&NCIPI
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