| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas generator where a pressure control valve is protected over a long period of time by making the service life of a filter longer. SOLUTION: The gas generator where an electrolytic bath comprising hydrogen fluoride in an electrolytic cell is electrolyzed to generate gas is provided with: piping for gas having a filter of removing particulates and mist in the electrolytic bath accompanying the generation of gas at the inside; and a temperature controlling mechanism of controlling the temperature of a part in the piping. The filter is arranged at a position in contact with hydrogen fluoride liquefied at the part whose temperature is controlled by the temperature controlling mechanism. COPYRIGHT: (C)2006,JPO&NCIPI
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