METHOD AND DEVICE FOR PRODUCING LOW-PRESSURE PLASMA AND THE USE THEREOF

摘要

The invention relates to a method for producing a low-pressure plasma consisting in generating a negative pressure in a low-pressure chamber by means of a vacuum pump and in leading a plasma beam at a high pressure to said low- pressure chamber. Said invention also relates to different use a low-pressure plasma for treating surfaces, surface coatings or gases. A device for producing a low-pressure plasma is also disclosed.