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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
KR20060035977(A)
申请公布日期
2006.04.27
申请号
KR20040084397
申请日期
2004.10.21
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KANG, TAE GWAN
分类号
H01L21/68;H01L21/304
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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