| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resist liquid feeder capable of bringing a pump close to an opening and closing valve in piping. <P>SOLUTION: A mounting unit 175, capable of attaching valves and a pump thereto, is connected to a second piping 176 for communicating a tank with a resist liquid supply nozzle. A first opening and closing valve 190, the pump 191, and a second opening and closing valve 192, are attached to a mounting unit 175 sequentially from upstream side. A first connecting flow passage 200 for communicating an external inflow port 180 with a first opening and closing valve 190, a second connecting flow passage 201 for communicating the first opening and closing valve 190 with the pump 191, a third connecting flow passage 202 for communicating the pump 191 with the second opening and closing valve 192, and a fourth connecting flow passage 203 for communicating the second opening and closing valve 192 with an external outflow port 181, are formed inside of the mounting unit 175. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
