| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacturing method of an etching metal body which improves yield. SOLUTION: In the manufacturing method of an etching metal body; a process for preparing a metal foil sticking body 10 comprising a protective film 2 supporting a pressure sensitive adhesive layer 4 which can lower adhesion by irradiation of active energy beam in the surface of a supporter 3 and a metallic layer 1 to be etched, and forming a resist film 5 in the surface of the metallic layer to be etched; and a process for irradiating an adhesive layer with active energy beam via an irradiation mask sheet 31 with a transmitting region 31b and a non-transmitting region 31a of active energy beam, hardening an adhesive by at least irradiating an etchant contact region, and keeping the adhesive in its un-hardened state without irradiating at least a part of the etchant non-contact region are carried out in an arbitrary order. An etching process is carried out, and the method comprises each of processes for hardening the un-hardened adhesive by irradiation of active energy beam and for forming an etching metal body by peeling the protection film. COPYRIGHT: (C)2006,JPO&NCIPI |
