| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method capable of grasping clearly an abnormality such as a failure wherein, when the surface of a cut workpiece has a circular pattern such as a spiral groove, the spiral groove is not removed. SOLUTION: The surface of the cut workpiece is imaged, and each pixel in an input image is subjected to frequency conversion by using a frequency filter emphasizing a change toward the center direction of the image, to thereby remove a low frequency component, and to generate a frequency-converted image, and binarization processing of each pixel in the frequency-converted image is performed in consideration of the state of an adjacent comparative object domain, to thereby generate a binarization-processed image, and quality determination is performed based thereon. COPYRIGHT: (C)2006,JPO&NCIPI
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