发明名称 |
Reduced capacity carrier and method of use |
摘要 |
A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
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申请公布号 |
US2006088272(A1) |
申请公布日期 |
2006.04.27 |
申请号 |
US20050207231 |
申请日期 |
2005.08.19 |
申请人 |
GILCHRIST ULYSSES;FOSNIGHT WILLIAM;HOFMEISTER CHRISTOPHER;FRIEDMAN GERALD M;BUFANO MICHAEL L |
发明人 |
GILCHRIST ULYSSES;FOSNIGHT WILLIAM;HOFMEISTER CHRISTOPHER;FRIEDMAN GERALD M.;BUFANO MICHAEL L. |
分类号 |
G02B6/00 |
主分类号 |
G02B6/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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