申请人 |
KLA-TENCOR TECHNOLOGIES CORP.;TEH, CHO, HUAK;TORELLI, TOMMASO;DAVID, DOMINIC;YEUNG, CHIUMAN;SCOTT, MICHAEL, GORDON;BALASUBRAMANIAN, LALITA, A.;GAO, LISHENG;HUANG, TONG;ZHANG, JIANXIN;KOWALSKI, MICHAL;OAKLEY, JONATHAN |
发明人 |
TEH, CHO, HUAK;TORELLI, TOMMASO;DAVID, DOMINIC;YEUNG, CHIUMAN;SCOTT, MICHAEL, GORDON;BALASUBRAMANIAN, LALITA, A.;GAO, LISHENG;HUANG, TONG;ZHANG, JIANXIN;KOWALSKI, MICHAL;OAKLEY, JONATHAN |