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发明名称
Reinigungsmittel nach CMP-Gebrauch
摘要
申请公布号
DE60301907(T2)
申请公布日期
2006.04.27
申请号
DE20036001907T
申请日期
2003.05.14
申请人
NEC ELECTRONICS CORP., KAWASAKI;KANTO KAGAKU K.K., TOKIO/TOKYO
发明人
ABE, YUMIKO;OOWADA, TAKUO;ISHIKAWA, NORIO;AOKI, HIDEMITSU;TOMIMORI, HIROAKI
分类号
C11D1/00;H01L21/321;C11D3/20;C11D7/26;C11D11/00;C11D17/08;H01L21/02;H01L21/304
主分类号
C11D1/00
代理机构
代理人
主权项
地址
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