发明名称 DRAWING METHOD AND APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a drawing method and a drawing apparatus capable of shortening a drawing time by making the modulation speed of a space light modulation element quicker, with respect to the drawing method for performing drawing by relatively moving the space light modulation element on which a large number of micro mirrors for modulating incident light in accordance with a transferred control signal are arranged, in the prescribed direction for a drawing screen. <P>SOLUTION: The space light modulation element is divided into a plurality of block regions A to D with respect to the scanning directions, and control signals at every the plurality of block regions A to D are transferred in parallel. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006113412(A) 申请公布日期 2006.04.27
申请号 JP20040302283 申请日期 2004.10.15
申请人 FUJI PHOTO FILM CO LTD 发明人 OZAKI TAKAO;OKAZAKI YOJI
分类号 G03F7/20;H01L21/027;H04N1/04 主分类号 G03F7/20
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