发明名称 |
PLASMA GENERATOR |
摘要 |
<p>A microfabricated plasma generator and a method of generating a plasma, the plasma generator comprising: a substrate chip; a chamber defined by the substrate chip, the chamber including an inlet port through which analyte is in use delivered, an outlet port and a plasma-generation region in which a plasma is in use generated; and first and second electrodes across which a voltage is in use applied to generate a plasma in the plasma-generation region.</p> |
申请公布号 |
EP1133901(B8) |
申请公布日期 |
2006.05.03 |
申请号 |
EP19990956183 |
申请日期 |
1999.11.23 |
申请人 |
CASECT LIMITED |
发明人 |
MANZ, ANDREAS;EIJKEL, JAN, CORNELIS, TITUS;STOERI, HERBERT |
分类号 |
G01N30/02;H05H1/24;H05H1/36 |
主分类号 |
G01N30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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