| 发明名称 |
MOBILE MECHANISM, POSITIONING DEVICE AND PRINTING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning device capable of being applied to a simple and closely attached form plate, a mobile mechanism and a printing method. <P>SOLUTION: The positioning device has a surface plate 4 supporting the form plate 3 and the mobile mechanisms 5 buried in the surface plate 4 and supporting the form plate 3 from a lower section and moving the form plate 3. The mobile mechanisms 5 have an evacuation part 12 sticking to the placed form plate 3 and an X-axis stage 10 and a Y-axis stage 11 (driving stages) moving the form plate 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2006128340(A) |
申请公布日期 |
2006.05.18 |
| 申请号 |
JP20040313431 |
申请日期 |
2004.10.28 |
| 申请人 |
MITSUBISHI HEAVY IND LTD |
发明人 |
TAWARA SATOSHI;NAKAYA YOSHINORI |
| 分类号 |
H01L21/68;B41F15/20;B41F17/14;G02F1/1335;H01L21/683 |
主分类号 |
H01L21/68 |
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