| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin-film resonator whose Q can be improved by decreasing energy losses in acoustic reflection layers, and besides to provide its fabricating method. <P>SOLUTION: The piezoelectric thin-film resonator is equipped with a pair of opposed excitation electrodes 16, 20, a piezoelectric thin film 14 arranged between the pair of the excitation electrodes 16, 20, and a substrate 12 for supporting one electrode 20 of the pair of the excitation electrodes. The one 20 of the pair of the excitation electrodes includes the acoustic reflection layers 21 to 26. The substrate 12 comprises a single crystal of LiTaO<SB>3</SB>or of LiNbO<SB>3</SB>. The acoustic reflection layers 21 to 26 each comprise an (a) epitaxial conductive material formed alternately on the substrate 12, at least one of first layers 21, 23, 25 whose acoustic impedance is relatively high; and (b) the other epitaxial conductive material, and besides including an at least one of second layer 22, 24, 26 whose acoustic impedance is relatively low. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
