| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an MEMS gyroscope for sensing angular velocity and angular acceleration by the rotation of a mobile unit. <P>SOLUTION: The tuning-fork type vibrating MEMS gyroscope comprises an outer side supporting portion 220 formed on a substrate 210, a plurality of external elastic members 310-360, a first 410 and a second external frame 420 individually having excitation combs 415, 425, a first 510 and a second excitation electrode 520 individually having comb exciting drivers 515, 525, a first 610 and a second internal elastic member 620 individually containing a plurality of internal spring members, a first 710 and a second internal frame 720 individually having sensing combs 715, 725, and a first 810 and a second sensing electrode 820 individually having comb sensors 815, 825. The tuning-fork type vibrating gyroscope resistant to surrounding acoustic noise can realize so that external structures of the internal frames are excited and the internal structures of the internal frames are sensed, which more stably operates by utilizing wine glass shaped elastic members. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
