摘要 |
<P>PROBLEM TO BE SOLVED: To provide a switching inverter standard power source, equipped with a plasma device capable of generating a plasma voltage which has not been obtainable with an inverter reference power source. <P>SOLUTION: A matrix transformer comprises a module provided with a primary part formed by a first tube and a second tube of which one end is connected, and a secondary part formed by a third tube and a fourth tube of which one end is connected. The third tube and the fourth tube are insulated from and fitted to the first tube and the second tube, and a concentric tube demarcates a parallel longitudinal passage passing through a module. Secondary windings are wound via the longitudinal passage of respective modules. The module includes a rectifying circuit for the secondary winding, and further, includes a serial circuit that serially connects the rectifying circuit of the plurality of modules. <P>COPYRIGHT: (C)2006,JPO&NCIPI |