| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a subwavelength structure optical element which is highly-precise and is excellent in durability and water-repellency. <P>SOLUTION: The subwavelength structure optical element comprises a substrate having a plurality of protruded parts which are arranged in a lattice shape with a period shorter than the used wavelength, a hard film is formed on the surface of the protruded part and a water-repellent film is formed on the surface of the hard film. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
