| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generation electrode excellent in thermal shock resistance, which enables the generation of stable plasma having a high electric field strength by a low input energy by reducing a reciprocal distance of the mutually counter unit electrodes. <P>SOLUTION: The plasma generation electrode provided with the mutually counter, two or more unit electrodes 2 is provided. The unit electrode 2 has a sheet-like main electrode 3, one or more supporting members 5 arranged on at least one of the surfaces of the main electrode 3, and one or more sheet-like sub electrodes 4 supported substantially in parallel to the main electrode 3 by the supporting member 5 with the predetermined clearance A from the surface of the main electrode 3. The main electrode 3 comprises at least a main ceramic derivative 6, and a main conductive film 7, and at the same time, the sub electrode 4 comprises at least a sub ceramic derivative 8, and a sub conductive film 9. Thus, in the plasma generation electrode, the counter sub electrodes 4 of other unit electrode 2 are arranged in the clearance between the main electrode 3 and the sub electrode 4 of one unit electrode 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
