| 摘要 |
PROBLEM TO BE SOLVED: To more reduce at least one of a gas leak from gas chambers to the outside and the adhesion of a processing gas to the surface of a work transfer apparatus. SOLUTION: The gas processing and manufacturing apparatus 10 comprises gas chambers PM1 to PM5 which are hermetically sealed and have processing gas atmospheres therein; a work transfer apparatus 12 having at least one of a work transfer-out function that is provided at a position independent from the gas chambers PM1 to PM5 for transferring the work from the inside to the outside of the gas chambers, and a transfer-in function for transferring the work from the outside to the inside of the gas chambers; and at least one of (1) a gas leak prevention structure for preventing the processing gas from leaking out of the gas chambers PM1 to PM5 during the work transfer, and (2) a heating device for heating a contact surface of the work transfer device 12 which the processing gas within the gas chambers contacts to a predetermined temperature or over by the time the work is transferred thereto. COPYRIGHT: (C)2006,JPO&NCIPI
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